Zaragoza:

BB	O’HANLON, J. F. A user’s guide to vacuum technology. 3rd ed. [s. l.]: Wiley-Interscience, 2003. ISBN 0471270520.
BB	Ohring, Milton. Materials science of thin films : deposition and structure / Milton Ohring . 2nd ed. San Diego [etc.] : Academic Press, cop. 2002

Zaragoza:

BB	O’HANLON, J. F. A user’s guide to vacuum technology. 3rd ed. [s. l.]: Wiley-Interscience, 2003. ISBN 0471270520.
BB	Ohring, Milton. Materials science of thin films : deposition and structure / Milton Ohring . 2nd ed. San Diego [etc.] : Academic Press, cop. 2002