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		  BRODIE, I.; MURAY, J. J. The physics of micro/nano-fabrication. [s. l.]: Springer, 2013. ISBN 9781441932211.
		  
		  		  
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		  Clein, Dan. CMOS IC Layout : concepts, methodologies, and tools.  Newnes, 1999
		  
		  		  
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		  KAAJAKARI, V. Practical MEMS. [s. l.]: Small Gear Pub., 2009. ISBN 9780982299104.
		  
		  		  
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		  Lyshevski, Sergey Edward. Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski . 2nd ed. Boca Raton, : CRC Press, c2005
		  
		  		  
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		  Pelesko, John A.. Modeling MEMS and NEMS / John A. Pelesko, David H. Bernstein  Boca Raton : Chapman & Hall/CRC, cop. 2003
		  
		  		  
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		  SAINT, C.; SAINT, J. IC layout basics : a practical guide. [s. l.]: McGraw-Hill, 2001. ISBN 0071386254.
		  
		  		  
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		  Saint, Christopher; Saint, Judy. IC Mask Design: Essential Layout Techniques.  McGraw-Hill, 2002
		  
		  		  
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		  Varadan, V. K.. RF MEMS and their Applications.  Wiley-Blackwell, 2002
		  
		  		  
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